1. Resolution : 3.0nm or better guaranteed at 25kV or 30kV 2. Magnifications 1) x5 - x300000 or wider 2) Digital display on LCD 3) Pre-settable mag. points : Pre-settable 3. Accelerating voltage : 0.3 - 30kV (53 steps or better) 4. Electron Optics 1) Filament Tungsten (W) hairpin type (Pre-centered cartridge exchange method Easy to exchange the filament) 2) Bias System Auto-bias (Continuous Variable) Linked with acc. voltage plus continuous voltage control 3) Anode Fixed Position System or better 2 Stage electromagnetic deflection 4) Gun Alignment Auto Gun Alignment (AGA) or equivalent 5) Stigmator 8 pole electro-magnetic type Automatic and manual stigmatism correction Optimum Stigma memory 6) Focus One touch automatic -focus function Coarse and fine Auto/manual focusing Focus wobbler built-in (in TV mode) Focus memory function Focus search function 7) Scanning Coil 2 stage electro-magnetic beam deflector