Model : Varian 820 ICP-MS Specification : 1. ICP-MS System 1) Nebulizer: Low(400nL/min)glass concentric nebulizer 2) Spraychamber: Peltier-cooled with variable temperature control from -15℃ to room temperature 3) Three independently pressure adjustable channel 4) Torch: One-piece, low flow 3. Ultra Pump 1) Type : PLC controlled double piston 2) Flow rate : 0.1 ~ 9.95 mL/min 3) Max Pressure : 4 MPa/40 bar 4. Vacuum Evaporation Chamber 1) Final Volume : 5.0 mL or 1.0 mL