1). Main unit: 8 inch Semi-Auto 2). Thermal system: -55C?to?+200C 3). Probe Station supports Low current measurement as low as 10fA and RF measurement. 4). Probe Station shall have a 8 x 8programmable stage with manual x, y and theta control. 5). Probe Station should have a Micro chamber for RFI, EMI and Thermal Shield, Eliminate electro-magnetic, ensuring a dark, noise-free and moisture-free measurement environment. Dark box are not required 6). Probe leakage + Noise: less than?1fA (Thermal off), 10fA(Thermal on) 7). Chuck leakage + Noise: less than?1fA(Thermal off), 20fA(Thermal on)