*Mechanical◈ Sample size : up to 100~150mm thick◈ Sample mass : up to 50 kg◈ Sample stage travel : 450mm ?800mm(Y) motorized stage *Scanner Unit◈ Scanning method: MEMS optical scanner ◈ XY resolution: 0.12um◈ Optical Zoom: 1X~6X, 0.1step ◈ Image scans size: 1,024x128x12 bits ~1,024 x 1,024x12 bits◈ Scan speed: 5f/s (image size 1,024x768) *Z-Drive◈ Up and down movement of revolver with built-in scale (resolution of 5 nm)◈ Minimum step: 0.01m ◈ Minimum Z display resolution: 0.001um◈ Z drive stroke: 100mm (Coarse and fine adjustment) *Field of View and Monitor Magnification◈ Field of View: 2,560X2,560um ~ 21X21um ◈ Monitor magnification:- Max.14,400 X (that images are viewed on a 19-inch LCD monitor)◈ Repeatability Target* X direction: Less than 3n-1=0.04um (On the condition that objective100 is used) *Z direction: Less than 3n-1=0.15+0.008Lum