1. Electron source: - Schottky Field emitter with high maximum beam current (100 nA) - High probe current (0.6 nA in a 1 nm spot) - Small energy spread (0.8 eV ~ 300 kV or less) - HT stability: 1.0 ppm - Spot drift: 1.0 nm/minute - Optimum operation at 300 kV and 200 kV (Easy mode change via just click button)2. Imaging - Point resolution: 0.20 nm or better - Information limit: 0.14 nm or better3. STEM - Fully embedded High Angle Annular Dark Field (HAADF) detector - HR STEM resolution: 0.17 nm or better - No delay is needed for lens stabilization when switching between HRTEM and HRSTEM4. Micro-analysis - Fully embedded STEM, EDS and EELS spectrum imaging available - Simultaneous acquirement of STEM, EDS, CCD, GIF should be possible - Small probes: 0.3 nm or better - Max convergence angle: 50 mrad or better.5. Specimen stage - Fully computer-controlled eucentric side-entry, high stability compustage - Max. eucentric tilt: ± 40도 or better - Drift: 0.5 nm/minute 6. Operation / automation - Operating system: Industry standard Windows 2000 or XP. - Optionally Remote Operation available