.Substrate size 200 × 200 mm.Effective deposition area 170 × 170 mm.Alignment : auto(± 5 μm) and pin type(± 150 μm).Mono, area and full color.Deposition uniformity : ± 5 %(organic), ± 7 %(metal)- Substrate size 200 × 200 mm.Effective deposition area 170 × 170 mm.Alignment : auto(± 5 μm) and pin type(± 150 μm).Mono, area and full color.Deposition uniformity : ± 5 %(organic), ± 7 %(metal)