AFM Head : Displacement detection system, Laser diode, Detection device
Scanner : Tube piezo element, 125um X 125um(X-Y) X 8um(Z)
Stage : Magnet Method, 24mm(φ) X 8mm(Sample size)
X, Y, Z Control Electronics : Piezo tube type feedback control of X,Y, Z axi
Resolution : Horizontal 0.2nm, Vertical 0.01nm