ㅇ 과제명 : 반도체광원 시험생산 기술지원사업
ㅇ 수행연도 : 2005.01~2009.12
ㅇ 과제책임자 : 김왕기

- 특징 : Optical dielectric coating 전용 dual ion beam sputter system
- 구성
1) Process Chamber
- Vertical split bell jar type with stainless steel liner
- Single dome diameter
- Chamber heater and wall cooling
- Inner shield cover, shuttered view, gauge and vent port
- OMS and quartz crystal monitoring or can be upgradable
2) Pumping System
- Ultimate pressure : 8.0×10-8 torr(after 18 hours pumping)
- Leak rate : 6.2×10-6 torrL/s
- Crossover time to high vacuum : 14 min.
- Pump down within 60 min. : 3.0×10-7 torr(prior to dep. process)
- Auto regeneration cryo pump and mechanical pumps with molecular sieve trap
- Soft roughing and venting function
- Ion gauges, controller and auto sequence valves
3) Target Assembly
- Three or more water cooled backing plate
- Supplied target and bonding : Ta&SiO2
- Automatic target change and oscillation function
- Easy exchangeable and easy maintenance for targets
4) Substrate Fixtures
- Single dome rotation type
- Heating elements for process temperature 250C or higher
- Shields, substrate shutter, shadow masks for each materials
- Substrate size of max. 6 inch and providing substrate tooling
- Uniformity : 0.1% across 25 mm band within 90 and 150 mm radius from fixture center fro SiO2 and Ta2O5
5) Sputter Sources and Neutralizers
- Filamentless RF ion beam deposition source : 16 cm or higher diameter, dished molybdenum grids, 3 grids configuration, RF installation kit
- Filamentless RF ion beam assist source: 12 cm or higher diameter, dished molybdenum grids, 3 grids configuration, RF installation kit
- RF power supply : 500W, 13.56 MHz, RF neutralizer supplies, automated matching network and controller
- Filamentless RF neutralizer
6) Gas Flow Controllers
- Flowmeter and valve combinations : 2 set with 3 channels
- Reactive gas compatible
- VCR fittings
- Positive shut off and bypass valves
7) System Process Manager
- Fully automated processing control manager
- Extensive data logging and analysis capability
- Custom system maintenance scheduler
- Standard remote operation capability
- Pager notification for power loss/process errors
- Standard security features with password protection
- Graphical system display and user interface
- Computer and Windows XP or higher
- Optional remote operation capability by modem or network