▣ Measurement Techniques : Optical phase-shifting and white light vertical scanning interferometry.
▣ Measurement Capability : Non-contact 3D surface profile measurements
▣ Objectives : 5x 10x and 50x ESD Compliant
▣ Field-of-View Lenses : 0.5x 1x and 2x
▣ Measurement Array : User-Selectable maximum array 736 x 480
▣ Stage : Manual +/- 50.8mm X/Y translation +/- 4 degrees tip/tilt
▣ Optical Assembly : Integrated illuminator interchangeable discrete FOV lenses Closed loop precision vertical scanning assembly.
▣ Turret : Quadruple Turret Manual
▣ Standards : Reference Mirror for Phase-Shifting and 10um Step Height for Vertical Scanning.
▣ Computer System : At least Pentium4 3.2GHz Processor with 80GB HDD CD-RW 1GB RAM.