1. Resolution : 7 nm @ 30 kV guaranteed, 5 nm achievable 2. Magnification : 600x - 500kx 3. Probe Current : 1 pA - 50 nA 4. Emitter : Ga liquid metal ion source (LMIS) 5. Detectors : In-column: EsB with filtering grid (BSE) Filtering grid voltage 0 - 1500V 6. Operating Pressure : 5x10-5 mbar or lower 7. Specimen Stage : 6-axes fully eccentric, all motorized 8. Gas Injection System : Up to 5 gases for selective Etching, enhanced etching, material deposition, Insulator deposition 9. EDX (Energy Dispersive X-ray Spectrometer)