1 - Accelerating Voltage : 200kV 2 - Resolution : 1) Basic Instrument - Point to Point : 0.24nm ~ 0.29nm - Information Limit : 0.14nm ~ 0.19nm - Energy Resolution : 0.7eV or less 2) TEM Diffraction - Global and Elastic CBED/LACBED 3 - Magnification Range : 8x - 1200kx 4 - Probe Current : 10pA - 80nA 5 - Emitter : ZrO/W-field Emitter System 6 - ILLumination Tilt and Shift - Beam shift(MAG Mode) : +-20um or less - Beam shift(LM Mode) : +-0.75um or less 7 - Specimen Stage : 5-axes fully eccentirc, all motorized 8 - EDX(Energy Dispersive X-ray Spectrometer)