Process Bath (AAO)
Operatiing Temperature: 2~50℃
Accuracy ±1℃
temp. control flowmeter filter pump
level sensor temp. sensor
양극과 음극간의 거리 조절 가능 (3~20cm)
기포 제거 기능 / Teflon heater
Chiller 1set
chemical pumping drain and bottle
Power source 제공

Process bath(Widening)
Operatiing Temperature: RT~70℃
Accuracy < ±1℃
Equipment: temp. control pump
Instrument: temp. sensor
Heater: Teflon heater
Drain: chemical pumping drain and bottle

Process bath (Etching)
Operatiing Temperature: RT~70℃
Accuracy < ±1℃
Equipment: temp. control pump
Instrument: temp. sensor
Heater: Teflon heater
Drain: chemical pumping drain and bottle