Optic module :10X 20X 50X 100X
Measurement field[um] : 183 46 7.3 1.8
Working distance[mm] : 10.1 3.1 0.66 0.31
Numeric aperture : 0.30 0.46 0.80 0.95
Max. surface slope for
specular reflection[°] : 8.7 13.7 26.6 35.9