Electronic requirement : 200V to 30kV, 1.5nm at > 10kV, 2.5nm at 1kV, 3.5nm at 500V, 0.12mm Min. (M=10), 6mm Max. (M=20x)Emitter : in-house Schotty emitter with high stabilityDetector : in the lens SE and BS with energy threshold5 axis motorized (x, y, z, r, t), Free space Max. 59mm