ICP380 Source (Alumina), with 5kW, 2MHz RF Generator Externally mounted gas pod for up to six MFC linesICP Accelerator for ICP380, 6" wafers, including licence600W, 13.56Mhz RF Generator Alcatel 2015C2 rotary pump charged with Fomblin oil(15cu m/hr) ICP process chamber with single viewportAlcatel ADP122P Dry pump for turbo backing