* Measurement Time : scan time about 1
second per point
* Light source : 6328Å HeNe Laser
* Beam Diameter : 15 X 44 Micron at 70˚
* Stage : Computer controlled with tilt and table height adjustment
* Incidence Angle : 30,45,50,55,60,65,70,75,80, 90 degree manually selectable
* Film thickness range : 0~60000Å on substrate or on 1,2,3 or known sub layers
* Precision and repeatability : ± 1Å over most of the measurement range
* Refractive index : ±0.002 over most of the measurement range
* Environment : 20℃ (65℉) dry dust free atmosphere