RAITH GMBH
RAITH 150
10년
주장비
교육
기계가공·시험장비 > 반도체장비 > 리소그래픽장비
2007-10-02
583,510,000원
고정형
시간별
5,200,000원
Main power 230 V (U.S. option of 208 V with boost transformer)
4kVA-6kVA consumption dependant on accessories
System chiller (water) 230 V 50 Hz 8 A (U.S. customers 115 V 60 Hz 15 A)
Objective Lens Chiller
(optional)
230 V 50 Hz 8 A (U.S. customers 115 V 60 Hz 11 A)
Nitrogen 2 liter/minute at 1.2 bar (0.2 bar over atmospheric)
Compressed air 8 bar (static)
Ambient temperature 20-30 °C
Relative humidity Less than 65 %
Floor vibration Less than 2 μm/sec rms. at frequencies below 15 Hz
Less than 20 μm/sec rms. at frequencies above 15 Hz
Magnetic fields Less than 3 mG peak-to-peak over 50-60 Hz range
Acoustic noise Less than 40 dBA at frequencies below 100 Hz
Less than 55 dBA at frequencies above 100 Hz
Main power 230 V (U.S. option of 208 V with boost transformer)
4kVA-6kVA consumption dependant on accessories
System chiller (water) 230 V 50 Hz 8 A (U.S. customers 115 V 60 Hz 15 A)
Objective Lens Chiller
(optional)
230 V 50 Hz 8 A (U.S. customers 115 V 60 Hz 11 A)
Nitrogen 2 liter/minute at 1.2 bar (0.2 bar over atmospheric)
Compressed air 8 bar (static)
Ambient temperature 20-30 °C
Relative humidity Less than 65 %
Floor vibration Less than 2 μm/sec rms. at frequencies below 15 Hz
Less than 20 μm/sec rms. at frequencies above 15 Hz
Magnetic fields Less than 3 mG peak-to-peak over 50-60 Hz range
Acoustic noise Less than 40 dBA at frequencies below 100 Hz
Less than 55 dBA at frequencies above 100 Hz