* Excimer laser
Laser medium : KrF
Wavelength : 248nm
Max.pulse power : 250mJ
Repertition rate : 100Hz
Energy stability : σ<4%
Beam dimension :7mm*15m
* TFT-Annealing optic system
Accuracy : ± 5um over full travel
Maximum speed : 50nm/sec
Work piece viewer
: B/W high resolution CCD camera, Halogen
incident light source, Variable intensity
Substrate auto alignment system
: Software for operator assisted wafer
alignment imaged displayed on monitor,
Automatic correction of work piece
alignment in X, Y