3 chamber system : Unwinder, process, rewinder chamber- Winding system : 600 mm width film, Tension control unit (~30 kg) Up to 20 mpm speed, Forward & Reverse winding- Pretreatment : IR heater(RT~200℃), Linear ion beam source (~ 5 kW)- Cathode : rectangular type dual 1 set, single 2 sets- Power : Pulsed DC (10 kW) 2EA, RF (10 kW) 2 EA, MF (10 kW) 1 EA- Under 5×10-7 Torr in process chamber- Film thickness uniformity : 5%(at 550 mmW, 1000 mL)- Main Drum temp. : -10 ~ 80 ℃- PLC control & data logging system- Hook-up system (process gas, PCW line, etc.)- In-situ measurement system : Sheet resistance, transsmittance