1. Scanning method1) Closed-loop controlled piezo-based scanning sensor2) Closed-loop controlled motor scanning2. Scanning range z-axis1) Piezo-based scanning range : 150 ㎛2) Motor scanning range : 5 mm3. Scanning speed1) High accuracy mode : 2.4 ㎛/sec2) High speed mode : 7.2 ㎛/sec4. Resolution1) Vertical resolution : 0.1 nm2) Lateral resolution : 0.4 ㎛5. Step height repeatability : 0.5% at 1σ or better6. Measuring method1) White light scanning interferometery2) Phase shift interferometery7. Interference lenses1) 5x Michelson interference objective type2) 10x Mirau interference objective type3) 50x Mirau interference objective type8. Data analysis and image processing softwares