○ NG electron gun with Schottky thermal field emitter with hot-swap capability type UHR FE-SEM
○ Magnum Ion Column/Gas Injection System/EDX
○ Auto TEM Sample S/W
○ Sample Sizes : Max[200mm] diameter, Max thickness[20mm]
○ Image View (Secondary Ion Image, Secondary Electron Image)
○ Cutting (Cross section 관찰, TEM Sample Preperation)
○ Deposition (Source : Platinum, Insulator)/SPI
○ 가속전압 : 30kV
○ Ion Beam Resolution : 5nm