○ Accelerating Voltage : 300 kV(100~300kV)
○ Resolution
1) Lattice resolution : 0.14nm
2) Point resolution : 0.21nm
○ Magnification
1)Standard mode : X4,000 to 1,200,000
○ Electron Gun
1) Filament : Single-crystal LaB6 filament DC heating method, Filament voltage presetting system
2) Bias : Semi-fixed bias system, bias voltage presetting system
○ Illumination System
1) Lens configuration : 4-stage condenser lens system
2) Beam tilt angle : x,y= ±3˚
3) Spot size -Micro mode : 50 to 200nm(4steps) -Nano mode : 1 to 10nm(4steps)
○ Specimen Chamber
1) Specimen stage : 5-axis eucentric stage
2) Specimen size : 3mm dia
3) Specimen movement : X,Y= ±1mm, Z= ±0.2mm
4) Specimen tilt angle : α = ±30˚
○ Environment Measurement
1) Heating : In-situ 상태로 ~1000℃의 heating
2) Cooling : LN2 온도까지의 cooling
3) Gas reaction : heating을 동반한 gas reaction 실험