○ Lattice resolution : 0.2nm
○ Magnification : x100 to x10,000,000
○ Accelerating voltage : 200kV
○ Beam emission method : Schottky Emission source Image observation signals : SE, Phase Contrast, HADP, Live DP, EDS Live 3-D Tomo
○ Specimen size : 3mm dia.
○ Specimen movement Range : 0.1nm accuracy fully Compu-Motor X,Y : ±1mm, Z : ±0.3mm
○ Specimen tilt angle : ±30˚