1. Energy resolution of Al monochromatic source : <0.48eV(FWHM Ag 3d5/2)2. Charge compesation system : Co-axial charge neutralization3. Acceleration voltage of floating ion source : 0.5~4kV4. Analysis spot size : 15㎛, 27㎛, 55㎛, 300×700㎛5. Detectable energy range(K.E) : 100 ~ 1500 eV6. Accelerating voltage : 1~15kV7. Probe current range : 1~10A8. Pass energy range : 5, 10, 20, 40, 80, 160 eV9. Automatic Charge compesation system : <0.68eV(FWHM on PET)10. Parallel XPS imaging resolution : <3㎛ 11. Magnification of parallel imaging : 220×220㎛, 425×425㎛, 950×950㎛