aker / Model : Sunic / Sunicelplus200

Application
Pre-Treatment Module : Surface treatment of ITO Glass
▷ Plasma of Ar/02 mixed gas
Organic module : Total 8ea, simultaneously 3ea control.
▷ Organic Depo : Alq3, NPB, Liq..etc
Meal Module : Metal evaporation Depo.
▷ Metal Depo : Al, LiF, Mg..etc
Sputter Module :DC or RF Sputtering Depo
▷ ITO, ZnO, Al2O3
Glove Box : moisture and O2 concentration less than 1ppm.

Equipment Performance
Operation Mode
: Automation and Manual Operation available
Available substrate size: 200×200mm ( 8 inch wafer )
Effective deposition area : 170×170mm
※ the process of small glass (25×25mm or 50×50mm) possible.
Chamber Size: 700mm(Dia) * 560mm(H)
Base Pressure ≤ 2.0E-7 Torr
Process Temp. Range : Organic chamber ≤ 500℃
Metal chamber ≤ 1500℃
Process Performance
Sputter Module : ITO Deposition ● Organic Module : Green emitting device
▷ THK Uniformity < 1.5% (1sigma) ▷ 12.5V : 45,000 Luminance